BS EN 62047-6-2010 半导体装置.微机电装置.薄膜材料的轴向疲劳试验方法

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【英文标准名称】:Semiconductordevices-Micro-electromechanicaldevices-Axialfatiguetestingmethodsofthinfilmmaterials
【原文标准名称】:半导体装置.微机电装置.薄膜材料的轴向疲劳试验方法
【标准号】:BSEN62047-6-2010
【标准状态】:现行
【国别】:英国
【发布日期】:2010-04-30
【实施或试行日期】:2010-04-30
【发布单位】:英国标准学会(GB-BSI)
【起草单位】:BSI
【标准类型】:()
【标准水平】:()
【中文主题词】:定义(术语);疲劳;疲劳极限;材料;微电子学;微系统工艺;样品;半导体器件;系统工程;拉伸应变;抗拉试验;试验;测试装置;试验体系;薄膜;薄膜器件;薄膜工艺
【英文主题词】:Definitions;Fatigue;Fatiguelimit;Materials;Microelectronics;Microsystemtechniques;Samples;Semiconductordevices;Systemengineering;Tensilestrain;Tensiletesting;Testing;Testingdevices;Testingsystem;Thinfilms;Thin-filmdevices;Thin-filmtechnology
【摘要】:ThisInternationalStandardspecifiesthemethodforaxialtensile–tensileforcefatiguetestingofthinfilmmaterialswithalengthandwidthunder1mmandathicknessintherangebetween0,1μmand10μmunderconstantforcerangeorconstantdisplacementrange.ThinfilmsareusedasmainstructuralmaterialsforMEMSandmicromachines.ThemainstructuralmaterialsforMEMS,micromachines,etc.,havespecialfeatures,suchastypicaldimensionsofafewmicrons,materialfabricationbydeposition,andtestpiecefabricationbymeansofnon-mechanicalmachining,includingphotolithography.ThisInternationalStandardspecifiestheaxialforcefatiguetestingmethodsformicro-sizedsmoothspecimens,whichenablesaguaranteeofaccuracycorrespondingtothespecialfeatures.Thetestsarecarriedoutatroomtemperatures,inair,withloadingappliedtothetestpiecealongthelongitudinalaxis.
【中国标准分类号】:K24
【国际标准分类号】:31_080_99
【页数】:20P.;A4
【正文语种】:英语